Silicon Materials-Processing, Characterization and Reliability: Volume 716 (MRS Proceedings) Veteran, Janice L.; O'Meara, David L.; Misra, Veena and Ho, Paul S.

ISBN 10: 1558996524 / ISBN 13: 9781558996526

Editore: Cambridge University Press, 2002

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2002 hardcover no dj as issued xlibrary copy withdrawn stamp on edge of pages/ in book clean text vol 716 672 pages::: J-14. Codice articolo 0812IB66H31

Dati bibliografici

Titolo: Silicon Materials-Processing, ...

Casa editrice: Cambridge University Press

Data di pubblicazione: 2002

Legatura: Rilegato

Condizione: Used: Good

Descrizione articolo

Riassunto:

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Descrizione del libro:

This book provides a solid look into the technical status of the semiconductor industry. The evolution of transistors to miniaturization beyond the capabilities of conventional IC processing has created a need for materials research in many levels of the integrated circuit fabrication, including new materials in substrates, gates and interconnects.