The book Smart Sensors and MEMS provides an unique collection of contributions on latest achievements in sensors area and technologies that have made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute (ASI) in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the theoretical and applied research in these areas, and promote the practical using of these techniques in the industry. With that in mind, a broad range of physical, chemical and biosensors design principles, technologies and applications were included in the book.
It is a first attempt to describe in the same book different physical, chemical, biological sensors and MEMS technologies suitable for smart sensors creation. The book presents the state-of-the-art and gives an excellent opportunity to provide a systematic, in-depth treatment of the new and rapidly developing field of smart sensors and MEMS.
The volume is an excellent guide for practicing engineers, researchers and students interested in this crucial aspect of actual smart sensor design.
Contents List of Contributors………………………………………....…..ix-xi Preface ……………………………..………………………......xii-xiv Acknowledgement…………………………………………...……..xv 1. Smart Sensors for Electrical and Non-electrical, Physical and Chemical Variables: State-of-the-art Sergey Y. Yurish…………………………………………………………1 2. Novel Conversion Methods for Self-Adaptive Smart Sensors Sergey Y. Yurish and Nikolay V. Kirianaki…………………….……....51 3. Resonant Piezoelectric Devices as Physical and Biochemical Sensors Fabien Josse and Richard W. Cernosek………………………………...91 4. Acoustic-Wave Piezoelectric and Pyroelectric Sensors Based on PZT Thick Films Vittorio Ferrari………………………………………………………...125 5. Wireless Passive SAW Identification Marks and Sensors Elke Mackensen and Leonhard Reindl..................................................155 6. Precise Vectorial Magnetic Sensors Pavel Ripka……………………………………………………………203 7. Micro-Hall Magnetic Sensors: Physics, Technologies and Applications Radivoje S. Popovic et al……………………………………………… 8. Modern Silicon-based MEMS Technology Ulrich Mescheder……………………………………………………...255 9. Porous Silicon: Technology and Applications for Micromachining and MEMS Ulrich Mescheder……………………………………………………...273 10.Thermal Design of Microelectronics Systems Dmytro Fedasyuk and VolodymyrMakar…………...………………...289 11.Chemical and Biological Sensors Based on Microcantilevers P.G. Datskos, N.V. Lavrik and M. J. Sepaniak…………………….….331 12.Uncooled Infrared MEMS Detectors P.G. Datskos, N.V. Lavrik………………………………………….….381 13.Bulk Acoustic Wave Sensors in Chemical Analysis Maria Teresa S. R. Gomes…………………………………...….…..…421 14.Electronic Biosensors Based on Biomaterial-Nanoparticle Hybrid Systems Eugenii Katz…………………………………………
