Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications
. Ed(s): Behrisch, Rainer; Wittmaack, Klaus
ISBN 10: 3662311046 ISBN 13: 9783662311042
Editore: Springer, 2014
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Editor(s): Behrisch, Rainer; Wittmaack, Klaus. Series: Topics in Applied Physics. Num Pages: 415 pages, 66 black & white illustrations, 6 black & white tables, biography. BIC Classification: PNFS; TBC; TGM. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 23. Weight in Grams: 664. . 2014. Softcover reprint of the original 1st ed. 1991. paperback. . . . . Codice articolo V9783662311042
Riassunto:
Sputtering, the ejection of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This final volume in a three-part review of sputtering deals with the characterization of the sputtered particles and applications of the technique. It will be of interest to researchers in universities and in industry.
Contenuti: Angular, energy, and mass distribution of sputtered particles.- Charged and excited states of sputtered atoms.- Surface and depth analysis based on sputtering.- Desorption of organic molecules from solid and liquid surfaces induced by particle impact.- Production of microstructures by ion beam sputtering.- Production of thin films by controlled deposition of sputtered material.
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Titolo: Sputtering by Particle Bombardment III: ...
Casa editrice: Springer
Data di pubblicazione: 2014
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Sputtering by Particle Bombardment III
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Condizione: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today s experimental physics and technology. This is the third and final volume . Codice articolo 5224821
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Sputtering by Particle Bombardment III | Characteristics of Sputtered Particles, Technical Applications
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Taschenbuch. Condizione: Neu. Sputtering by Particle Bombardment III | Characteristics of Sputtered Particles, Technical Applications | Klaus Wittmaack (u. a.) | Taschenbuch | xv | Englisch | 2014 | Springer-Verlag GmbH | EAN 9783662311042 | Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg, juergen[dot]hartmann[at]springer[dot]com | Anbieter: preigu Print on Demand. Codice articolo 105087973
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Sputtering by Particle Bombardment III
ISBN 10: 3662311046
ISBN 13: 9783662311042
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Taschenbuch. Condizione: Neu. This item is printed on demand - Print on Demand Titel. Neuware -Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering.Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg 436 pp. Englisch. Codice articolo 9783662311042
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Sputtering by Particle Bombardment III : Characteristics of Sputtered Particles, Technical Applications
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Springer Berlin Heidelberg, 2014
ISBN 10: 3662311046
ISBN 13: 9783662311042
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Taschenbuch. Condizione: Neu. Druck auf Anfrage Neuware - Printed after ordering - Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering. Codice articolo 9783662311042
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ISBN 10: 3662311046
ISBN 13: 9783662311042
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Taschenbuch. Condizione: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering. 436 pp. Englisch. Codice articolo 9783662311042
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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications
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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)
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