Titolo: Sputtering by Particle Bombardment III : Characteristics of Sputtered Particles, Technical Applications
Editore: Springer
Data di pubblicazione: 2014
Lingua: Inglese
ISBN 10: 3662311046
ISBN 13: 9783662311042
Rilegatura: Brossura
Condizione: As New

Descrizione articolo

Riassunto

Sputtering, the ejection of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This final volume in a three-part review of sputtering deals with the characterization of the sputtered particles and applications of the technique. It will be of interest to researchers in universities and in industry.

Contenuti

Angular, energy, and mass distribution of sputtered particles.- Charged and excited states of sputtered atoms.- Surface and depth analysis based on sputtering.- Desorption of organic molecules from solid and liquid surfaces induced by particle impact.- Production of microstructures by ion beam sputtering.- Production of thin films by controlled deposition of sputtered material.

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