Series: Topics in Applied Physics. Num Pages: 509 pages, 201 black & white illustrations, 78 black & white tables. BIC Classification: PHV; TGM. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 24. Weight in Grams: 844. . 2007. Hardback. . . . . Books ship from the US and Ireland.

Codice articolo V9783540445005

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Titolo: Sputtering by Particle Bombardment
Editore: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Data di pubblicazione: 2007
Lingua: Inglese
ISBN 10: 3540445005
ISBN 13: 9783540445005
Rilegatura: Rilegato
Condizione: New

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Riassunto

This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.

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This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and their dependence on the incident energy and angle of incidence, as well as the energy and angular distributions of the sputtered atoms are presented. This concerns experimentally determined yields as well as a critical evaluation of the computational methods used to calculate the yields and distributions. The energies of the incident ions cover the range between a few eV up to several MeV. The influence of chemical effects between the incident ions and the atoms of the bombarded solid on the sputtering yields are also reviewed.

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