Transient Properties of HiPIMS Discharges

Anurag Mishra

ISBN 10: 3639716469 / ISBN 13: 9783639716467

Editore: Scholars' Press Mai 2014, 2014

Riguardo questo articolo

Neuware -HiPIMS (High Power Impulse Magnetron Sputtering) is a relatively new highly ionized sputtering technique used to deposit engineering quality thin films, with the advantage that the deposition flux can be guided to the substrate through the electrical biasing. As the technique is on the verge of being adopted by the industries, it is necessary to understand its physics very well so that thin films with tailored properties can be deposited. Therefore, time-resolved diagnostic studies have been carried out to get better physical insight of the HiPIMS processes. This book also provides information of lower deposition rates in HiPIMS discharge and suggests its solutions.VDM Verlag, Dudweiler Landstraße 99, 66123 Saarbrücken 212 pp. Englisch.

Codice articolo 9783639716467

Dati bibliografici

• Titolo: Transient Properties of HiPIMS Discharges
• Editore: Scholars' Press Mai 2014
• Data di pubblicazione: 2014
• Lingua: Inglese
• ISBN 10: 3639716469
• ISBN 13: 9783639716467
• Rilegatura: Taschenbuch
• Condizione: Neu

Descrizione articolo

Riassunto

HiPIMS (High Power Impulse Magnetron Sputtering) is a relatively new highly ionized sputtering technique used to deposit engineering quality thin films, with the advantage that the deposition flux can be guided to the substrate through the electrical biasing. As the technique is on the verge of being adopted by the industries, it is necessary to understand its physics very well so that thin films with tailored properties can be deposited. Therefore, time-resolved diagnostic studies have been carried out to get better physical insight of the HiPIMS processes. This book also provides information of lower deposition rates in HiPIMS discharge and suggests its solutions.

L'autore

Dr. Anurag Mishra is a senior researcher in Advanced Material Science and Engineering, Sungkyunkwan University, South Korea. He has his PhD from The University of Liverpool, United Kingdom. His work is on transient phenomena in High Power Impulse Magnetron Sputtering (HiPIMS) discharges. Dr. Mishra’s current research interests are Large