Transient Properties of HiPIMS Discharges

Anurag Mishra

ISBN 10: 3639716469 / ISBN 13: 9783639716467

Editore: Scholars' Press, 2014

Transient Properties of HiPIMS Discharges | Anurag Mishra | Taschenbuch | 212 S. | Englisch | 2014 | Scholars' Press | EAN 9783639716467 | Verantwortliche Person für die EU: BoD - Books on Demand, In de Tarpen 42, 22848 Norderstedt, info[at]bod[dot]de | Anbieter: preigu. Codice articolo 105255543

Riassunto:

HiPIMS (High Power Impulse Magnetron Sputtering) is a relatively new highly ionized sputtering technique used to deposit engineering quality thin films, with the advantage that the deposition flux can be guided to the substrate through the electrical biasing. As the technique is on the verge of being adopted by the industries, it is necessary to understand its physics very well so that thin films with tailored properties can be deposited. Therefore, time-resolved diagnostic studies have been carried out to get better physical insight of the HiPIMS processes. This book also provides information of lower deposition rates in HiPIMS discharge and suggests its solutions.

L'autore: Dr. Anurag Mishra is a senior researcher in Advanced Material Science and Engineering, Sungkyunkwan University, South Korea. He has his PhD from The University of Liverpool, United Kingdom. His work is on transient phenomena in High Power Impulse Magnetron Sputtering (HiPIMS) discharges. Dr. Mishra’s current research interests are Large

Dati bibliografici

Titolo: Transient Properties of HiPIMS Discharges
Casa editrice: Scholars' Press
Data di pubblicazione: 2014
Legatura: Taschenbuch
Condizione: Neu