A User's Guide to Vacuum Technology
O'Hanlon, John F.
ISBN 10: 0471812420 ISBN 13: 9780471812425
Editore: Wiley-Interscience, 1989
Usato
Hardcover
Da
HPB-Red, Dallas, TX, U.S.A.
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Descrizione:
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Riassunto:
This book introduces the reader to the theory and practice of modern vacuum technology, with applications. It focuses on the understanding, operation and selection of equipment for vacuum processes used in semiconductor, optical and related technologies. This second edition has new information on components, lubrication, pump fluids and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system. The book will be of benefit to electrical and mechanical engineers and graduate students. The previous edition of this book was published in 1980.
Product Description: Book by OHanlon John F
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Dati bibliografici
Titolo: A User's Guide to Vacuum Technology
Casa editrice: Wiley-Interscience
Data di pubblicazione: 1989
Legatura: Hardcover
Condizione: Acceptable
Edizione: seconda edizione