Isbn: 9787564140533 - mems材料与工艺手册 reza ghodssi 著 黄庆安 等 译 (1 risultati)

paperback. Condizione: New. Language:Chinese.Pub Date: 2014-03-01 Publisher: Southeast University Press. micro-electromechanical systems (MEMS) technology is a rapidly developing field of cutting-edge technology. materials used many kinds of process for complex. requiring the system to summarize. analyze and sort order readers inspection. This manual is a large professional tool to access the main. The book includes material like MEMS. MEMS processing technology and manufacturing processes. MEMS process integration meth. …