Micro Mechanical Systems: Principles and Technology: Volume 6 - Rilegato

 
9780444823632: Micro Mechanical Systems: Principles and Technology: Volume 6
Rilegato
ISBN 10: 0444823638 ISBN 13: 9780444823632
Casa editrice: Elsevier Science Serials, 1998

Sinossi

In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.

Le informazioni nella sezione "Riassunto" possono far riferimento a edizioni diverse di questo titolo.

Editore
Elsevier Science Serials
Data di pubblicazione
1998
Lingua
Inglese
ISBN 10 
0444823638
ISBN 13 
9780444823632
Rilegatura
Copertina rigida
Numero edizione
1
Numero di pagine
268
Redattore
Fukuda T., Menz W.
Contatto del produttore
non disponibile
Persona responsabile
LSWR Group
b.criscuolo@lswr.it

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