A User's Guide to Ellipsometry - Brossura

Tompkins, Harland G.

Brossura

ISBN 10: 0486450287 ISBN 13: 9780486450285

Casa editrice: Dover Pubns, 2006

Riassunto

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.
A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.

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Contenuti

1. Theoretical Aspects 2. Instrumentation 3. Using Optical Parameters to Determine Material Properties 4. Determining Optical Parameters for Inaccessible Substrates and Unknown Films 5. Extremely Thin Films 6. The Special Case of Polysilicon 7. The Effect of Roughness Case Studies Case 1. Dissolution and Swelling of Thin Polymer Films Case 2. Ion Beam Interaction with Silicon Case 3. Dry Oxidation of Metals Case 4. Optical Properties of Sputtered Chromium Suboxide Thin Films Case 5. Ion-assisted Film Growth of Zirconium Dioxide Case 6. Electrochemical/Ellipsometric Studies of Oxides on Metals Case 7. Amorphous Hydrogenated Carbon Films Case 8. Fluoropolymer Films on Silicon from Reactive Ion Etching Case 9. Various Films on InP Case 10. Benzotriazole and Benzimidazole on Copper Case 11. Gas Adsorption on Metal Surfaces Case 12. Silicon-Germanium Thin Films Case 13. Profiling of HgCdTe Case 14. Oxides and Nitrides of Silicon Appendices

Product Description

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 14 case studies illustrate concepts and applications. Three appendices provide helpful references. 1993 edition.

Dettagli dell?edizione

• Editore: Dover Pubns
• Data di pubblicazione: 2006
• Lingua: Inglese
• ISBN 10: 0486450287
• ISBN 13: 9780486450285
• Rilegatura: Copertina flessibile
• Numero di pagine: 260
• Contatto del produttore: non disponibile