Articoli correlati a Handbook of Semiconductor Interconnection Technology

Handbook of Semiconductor Interconnection Technology - Rilegato

Shwartz, Geraldine Cogin

 
9781574446746: Handbook of Semiconductor Interconnection Technology
Rilegato
ISBN 10: 1574446746 ISBN 13: 9781574446746
Casa editrice: CRC Press, 2006

Sinossi

First introduced about a decade ago, the first edition of the Handbook of Semiconductor Interconnection Technology became widely popular for its thorough, integrated treatment of interconnect technologies and its forward-looking perspective. The field has grown tremendously in the interim and many of the "likely directions" outlined in the first edition are now standard in modern facilities. Reflecting those advances, this edition delves into the practical aspects of interconnections for manufacturing. It examines the interconnect and fabrication technologies now available, with an examination of future prospects for the field.

What's in this Edition:

  • Detailed discussion of electrochemical equipment for plating copper
  • Information on tools used for evaporation, chemical vapor deposition, and plasma processes
  • Emphasis on measurement of mechanical and thermal properties of insulators
  • Methods for characterizing porous dielectric thin films
  • Greater focus on integration issues and properties of titanium, cobalt, and nickel silicides
  • Process schemes based on the increased need for borderless contact gates and source/drain
  • Expanded discussion on choices for low-dielectric insulators
  • Concentration on electroplated copper, especially morphology of plated films and their properties
  • Developments in thin film liners and barriers
  • Expanded material on copper reliability

    • Le informazioni nella sezione "Riassunto" possono far riferimento a edizioni diverse di questo titolo.

    Informazioni sull'autore

    Geraldine C. Schwartz, Geraldine Cogin Shwartz, Kris V. Srikrishnan

    Le informazioni nella sezione "Su questo libro" possono far riferimento a edizioni diverse di questo titolo.

    Editore
    CRC Press
    Data di pubblicazione
    2006
    Lingua
    Inglese
    ISBN 10 
    1574446746
    ISBN 13 
    9781574446746
    Rilegatura
    Copertina rigida
    Numero edizione
    2
    Numero di pagine
    536
    Redattore
    Schwartz Geraldine C., Srikrishnan Kris V.
    Contatto del produttore
    Taylor and Francis, GPSR Taylor and Francis
    gpsr@taylorandfrancis.com

    Taylor & Francis Verlag GmbH, Kaufingerstraße 24
    München
    80331
    Germania