Ultra Clean Processing of Silicon Surfaces V: Proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces Ucpss ... in Ostend, Belgium, September 2002: Volume 92 - Brossura

Brossura

ISBN 10: 3908450780 ISBN 13: 9783908450788

Casa editrice: Scitec Pubns, 2003

Riassunto

The issues addressed by the Sixth International Symposium on the Ultra Clean Processing of Silicon Surfaces included all aspects of ultra-clean Si-technology, cleaning and contamination control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing.
Volume is indexed by Thomson Reuters CPCI-S (WoS).
This covered studies of Si-surface chemistry and topography and its relationship to device performance and process yield, cleaning in relationship to new gate stacks, cleaning at the interconnect level, resist stripping and polymer removal, cleaning and contamination control of various new materials, wafer backside cleaning and cleaning following Chemical-Mechanical-Polishing (CMP).

Dettagli dell'edizione

• Editore: Scitec Pubns
• Data di pubblicazione: 2003
• Lingua: Inglese
• ISBN 10: 3908450780
• ISBN 13: 9783908450788
• Rilegatura: Copertina flessibile
• Numero di pagine: 320
• Redattore: Heyns Marc, Mertens Paul, Meuris Marc
• Contatto del produttore: non disponibile
• Persona responsabile: non disponibile