Ultra Clean Processing of Semiconductor Surfaces IX: Ucpss 2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces ... September 22-24, 2008: Volumes 145-146 - Brossura

 
9783908451648: Ultra Clean Processing of Semiconductor Surfaces IX: Ucpss 2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces ... September 22-24, 2008: Volumes 145-146
Brossura
ISBN 10: 3908451647 ISBN 13: 9783908451648
Casa editrice: Trans Tech Pubn, 2009

Sinossi

Volume is indexed by Thomson Reuters CPCI-S (WoS).
The contents of this publication include every conceivable issue related to contamination, cleaning and surface preparation during mainstream large-scale integrated circuit manufacture. Typically, silicon is used as the main semiconductor substrate. However, other semiconducting materials such as SiGe and SiC are currently being used in the source-sink junction areas, and materials such as Ge and III-V compounds are being considered for the transistor channel region of future-generation devices.

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Editore
Trans Tech Pubn
Data di pubblicazione
2009
Lingua
Inglese
ISBN 10 
3908451647
ISBN 13 
9783908451648
Rilegatura
Copertina flessibile
Numero di pagine
400
Redattore
Mertens Paul, Meuris Marc, Heyns Marc
Contatto del produttore
non disponibile
Persona responsabile
non disponibile