An Introduction To Mems Technology: Design & Analysis Of Mems Based Microheater Array On Soi Wafer For Low Power Gas Sensor Applications
Datta Gupta, Avigyan; Roy Chowdhury, Chirashree; Datta Gupta, Avigyan; Roy Chowdhury, Chirashree
ISBN 10: 3659247006 ISBN 13: 9783659247002
Editore: Lap Lambert Academic Publishing, 2012
Nuovi
Paperback
Da
Revaluation Books, Exeter, Regno Unito
Valutazione del venditore 5 su 5 stelle
Venditore AbeBooks dal 6 gennaio 2003
Questo articolo specifico non è più disponibile.
Riguardo questo articolo
Descrizione:
100 pages. 8.66x5.91x0.23 inches. In Stock. Codice articolo 3659247006
Riassunto:
Microelectromechanical systems(MEMS)are small integrated devices or systems that combine electrical and mechanical components. They range in size from the sub micrometer (or sub micron) level to the millimeter level, and there can be any number, from a few to millions, in a particular system. MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and springs to devices.These systems can sense, control, and activate mechanical processes on the micro scale, and function individually or in arrays to generate effects on the macro scale.In this book a detailed description of the design and analysis of MEMS based microheater array on SOI wafer for gas sensor application is proposed.MEMS based array of microheaters of SOI wafer have an added advantage which increases the efficiency of the microheater i.e less power is required to reach high temperature and also the thermal loss is minimized.They are usually produced using a standard CMOS process, have the additional advantages of being readily realized by commercial foundries and amenable to the inculsion of on-chip electronics.
L'autore: Avigyan Datta Gupta was born in Kolkata, WestBengal, India on 16thAugust, 1986.He received the B.Tech degree in Electronics & Instrumentation Engineering in 2011.He is involved in several projects & workshops in Jadavpur University,IIT Kharagpur and Bengal Engineering & Science University.His area of interest in Analog/Mixed Signal VLSI and MEMS.
Le informazioni nella sezione "Su questo libro" possono far riferimento a edizioni diverse di questo titolo.
Dati bibliografici
Titolo: An Introduction To Mems Technology: Design &...
Casa editrice: Lap Lambert Academic Publishing
Data di pubblicazione: 2012
Legatura: Paperback
Condizione: Brand New