ISBN: 9783659247002 - an introduction to mems technology: design & analysis of mems based microheater array on soi wafer for low power gas sensor applications (5 risultati)

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Taschenbuch. Condizione: Neu. An Introduction to MEMS Technology | Design & Analysis of MEMS Based Microheater Array on SOI Wafer for Low Power Gas Sensor Applications | Avigyan Datta Gupta (u. a.) | Taschenbuch | Englisch | LAP Lambert Academic Publishing | EAN 9783659247002 | Verantwortliche Person für die EU: preigu GmbH & Co. KG, Lengericher Landstr. 19, 49078 Osnabrück, mail[at]preigu[dot]de | Anbieter: preigu.…

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Taschenbuch. Condizione: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - Microelectromechanical systems(MEMS)are small integrated devices or systems that combine electrical and mechanical components. They range in size from the sub micrometer (or sub micron) level to the millimeter level, and there can be any number, from a few to millions, in a particular system. MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and springs to devices.These systems can sense, control, and activate mechanical processes on the micro scale, and function individually or in arrays to generate effects on the macro scale.In this book a detailed description of the design and analysis of MEMS based microheater array on SOI wafer for gas sensor application is proposed.MEMS based array of microheaters of SOI wafer have an added advantage which increases the efficiency of the microheater i.e less power is required to reach high temperature and also the thermal loss is minimized.They are usually produced using a standard CMOS process, have the additional advantages of being readily realized by commercial foundries and amenable to the inculsion of on-chip electronics.…

Kartoniert / Broschiert. Condizione: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Autor/Autorin: Datta Gupta AvigyanAvigyan Datta Gupta was born in Kolkata, WestBengal, India on 16thAugust, 1986.He received the B.Tech degree in Electronics & Instrumentation Engineering in 2011.He is involved in several projects & workshops in Ja. …