Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

Nonogaki, Saburo (Author)/ Takumi, Ueno (Author)/ Ito, Toshio (Author)

ISBN 10: 0824799518 / ISBN 13: 9780824799519

Editore: Marcel Dekker Inc, 1998

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illustrated edition. 327 pages. 9.50x6.50x0.75 inches. In Stock.

Codice articolo __0824799518

Dati bibliografici

• Titolo: Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
• Editore: Marcel Dekker Inc
• Data di pubblicazione: 1998
• Lingua: Inglese
• ISBN 10: 0824799518
• ISBN 13: 9780824799519
• Rilegatura: Hardcover
• Condizione: Brand New

Descrizione articolo

Riassunto

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

Informazioni sull?autore

Saburo Nonogaki, Ueno Takumi, Toshio Ito