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Louvain-la-Neuve ? la crois?e des chemins: Pr?face par Alain Bourdin (Acteurs pour l'universit?) (French Edition)
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MICROMACHINED THIN-FILM SENSORS FOR SOI-CMOS CO-INTEGRATION
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MICROMACHINED THIN-FILM SENSORS FOR SOI-CMOS CO-INTEGRATION
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Micromachined Thin-film Sensors For Soi-cmos Co-integration
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
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Aggiungi al carrelloCondizione: New. pp. 308 Illus.
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
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hardcover. Condizione: New. In shrink wrap. Looks like an interesting title!
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
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Condizione: New. pp. 308.
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Aggiungi al carrelloTaschenbuch. Condizione: Neu. Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration | Jean Laconte (u. a.) | Taschenbuch | xiv | Englisch | 2010 | Springer US | EAN 9781441939579 | Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg, juergen[dot]hartmann[at]springer[dot]com | Anbieter: preigu.
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Aggiungi al carrelloGebunden. Condizione: New. Co-integration of MEMS and MOS in SOI technology is promising and well demonstrated hereThe impact of Micromachining on SOI devices is deeply analyzed for the first timeInclude extensive TMAH etching, residual stress, microheaters, gas-flow.
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Aggiungi al carrelloTaschenbuch. Condizione: Neu. Druck auf Anfrage Neuware - Printed after ordering - Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost.Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology.We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 µm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated.The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Da: Mispah books, Redhill, SURRE, Regno Unito
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Aggiungi al carrelloPaperback. Condizione: Like New. LIKE NEW. SHIPS FROM MULTIPLE LOCATIONS. book.
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Aggiungi al carrelloBuch. Condizione: Neu. Neuware - Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost.Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology.We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 µm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated.The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.
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LOUVAIN LA NEUVE A LA CROISEE DES CHEMINS
Da: LiLi - La Liberté des Livres, CANEJAN, Francia
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Louvain-la-Neuve ? la crois?e des chemins: Pr?face par Alain Bourdin (Acteurs pour l'universit?) (French Edition)
Da: Majestic Books, Hounslow, Regno Unito
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Louvain-la-Neuve ? la crois?e des chemins: Pr?face par Alain Bourdin (Acteurs pour l'universit?) (French Edition)
Da: Biblios, Frankfurt am main, HESSE, Germania
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Louvain-la-Neuve à la croisée des chemins: Préface par Alain Bourdin (Acteurs pour l'université)
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Aggiungi al carrelloPaperback. Condizione: Brand New. 308 pages. French language. 8.46x5.31x0.73 inches. This item is printed on demand.
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration (eng)
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Lingua: Inglese
Editore: Springer-Verlag New York Inc., 2010
ISBN 10: 1441939571 ISBN 13: 9781441939579
Da: THE SAINT BOOKSTORE, Southport, Regno Unito
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Da: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Germania
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Aggiungi al carrelloTaschenbuch. Condizione: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost.Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology.We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 µm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated.The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology. 308 pp. Englisch.
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EUR 136,16
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Aggiungi al carrelloCondizione: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Co-integration of MEMS and MOS in SOI technology is promising and well demonstrated hereThe impact of Micromachining on SOI devices is deeply analyzed for the first timeInclude extensive TMAH etching, residual stress, microheaters, gas-flow.
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Da: Majestic Books, Hounslow, Regno Unito
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EUR 218,89
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Aggiungi al carrelloCondizione: New. Print on Demand pp. 308 49:B&W 6.14 x 9.21 in or 234 x 156 mm (Royal 8vo) Perfect Bound on White w/Gloss Lam.
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Lingua: Inglese
Editore: Springer US, Springer US Okt 2010, 2010
ISBN 10: 1441939571 ISBN 13: 9781441939579
Da: buchversandmimpf2000, Emtmannsberg, BAYE, Germania
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EUR 160,49
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Aggiungi al carrelloTaschenbuch. Condizione: Neu. This item is printed on demand - Print on Demand Titel. Neuware -Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 µm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.Springer-Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg 308 pp. Englisch.
