Da: GreatBookPrices, Columbia, MD, U.S.A.
EUR 17,16
Quantità: Più di 20 disponibili
Aggiungi al carrelloCondizione: New.
Paperback or Softback. Condizione: New. Stress Analysis of Silicon Carbide Microelectromechanical Systems Using Raman Spectroscopy. Book.
Da: Ria Christie Collections, Uxbridge, Regno Unito
EUR 19,47
Quantità: Più di 20 disponibili
Aggiungi al carrelloCondizione: New. In.
Da: GreatBookPricesUK, Woodford Green, Regno Unito
EUR 19,32
Quantità: Più di 20 disponibili
Aggiungi al carrelloCondizione: New.
Da: moluna, Greven, Germania
EUR 24,38
Quantità: Più di 20 disponibili
Aggiungi al carrelloCondizione: New. KlappentextrnrnDuring the fabrication of Micro-Electro-Mechanical Systems (MEMS), residual stress is often induced in the thin films that are deposited to create these systems. These stresses can cause the device to fail due to buckling, curling.
Lingua: Inglese
Editore: Creative Media Partners, LLC, 2012
ISBN 10: 128686237X ISBN 13: 9781286862377
Da: PBShop.store US, Wood Dale, IL, U.S.A.
EUR 20,77
Quantità: Più di 20 disponibili
Aggiungi al carrelloPAP. Condizione: New. New Book. Shipped from UK. THIS BOOK IS PRINTED ON DEMAND. Established seller since 2000.
Lingua: Inglese
Editore: Creative Media Partners, LLC Okt 2012, 2012
ISBN 10: 128686237X ISBN 13: 9781286862377
Da: AHA-BUCH GmbH, Einbeck, Germania
EUR 28,84
Quantità: 2 disponibili
Aggiungi al carrelloTaschenbuch. Condizione: Neu. Neuware - During the fabrication of Micro-Electro-Mechanical Systems (MEMS), residual stress is often induced in the thin films that are deposited to create these systems. These stresses can cause the device to fail due to buckling, curling, or fracture. Government and industry are looking for ways to characterize the stress during the deposition of thin films in order to reduce or eliminate device failure. Micro-Raman spectroscopy has been successfully used to analyze poly-silicon MEMS devices made with the Multi-User MEMS Process (MUMPS). Micro-Raman spectroscopy was selected because it is nondestructive, fast and has the potential for in situ stress monitoring. This research attempts to validate the use of Raman spectroscopy to analyze the stress in MEMS made of silicon carbide (SiC) using the Multi-User Silicon Carbide surface micromachining (MUSiC) process. Surface interferometry of fixed-fixed beam arrays and comb drive resonance test are employed to determine stress and compare it to the Raman values. Research also includes baseline spectra of 6H, 4H, and 15R poly-types of bulk SiC. Raman spectra of 1- to 2-µm thick 3C-SiC thin films deposited on silicon, silicon nitride, and silicon oxide substrates are presented as an attempt to establish a baseline spectra for 3C-SiC, the poly-type of SiC found in MEMS made with the MUSiC process.
Da: GreatBookPricesUK, Woodford Green, Regno Unito
EUR 110,78
Quantità: Più di 20 disponibili
Aggiungi al carrelloCondizione: As New. Unread book in perfect condition.
Lingua: Inglese
Editore: Creative Media Partners, LLC, 2012
ISBN 10: 128686237X ISBN 13: 9781286862377
Da: PBShop.store UK, Fairford, GLOS, Regno Unito
EUR 19,33
Quantità: Più di 20 disponibili
Aggiungi al carrelloPAP. Condizione: New. New Book. Delivered from our UK warehouse in 4 to 14 business days. THIS BOOK IS PRINTED ON DEMAND. Established seller since 2000.
Da: Mispah books, Redhill, SURRE, Regno Unito
EUR 101,26
Quantità: 1 disponibili
Aggiungi al carrellopaperback. Condizione: Like New. Like New. book.
Da: GreatBookPrices, Columbia, MD, U.S.A.
EUR 131,79
Quantità: Più di 20 disponibili
Aggiungi al carrelloCondizione: As New. Unread book in perfect condition.
Da: Majestic Books, Hounslow, Regno Unito
EUR 26,28
Quantità: 4 disponibili
Aggiungi al carrelloCondizione: New. Print on Demand pp. 122.
Da: Books Puddle, New York, NY, U.S.A.
Condizione: New. Print on Demand pp. 122.
Da: Biblios, Frankfurt am main, HESSE, Germania
EUR 26,77
Quantità: 4 disponibili
Aggiungi al carrelloCondizione: New. PRINT ON DEMAND pp. 122.