Da: Romtrade Corp., STERLING HEIGHTS, MI, U.S.A.
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Da: Romtrade Corp., STERLING HEIGHTS, MI, U.S.A.
Condizione: New. This is a Brand-new US Edition. This Item may be shipped from US or any other country as we have multiple locations worldwide.
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Da: Books Puddle, New York, NY, U.S.A.
Condizione: New. pp. 340.
Da: Majestic Books, Hounslow, Regno Unito
EUR 110,08
Quantità: 4 disponibili
Aggiungi al carrelloCondizione: New. pp. 340 52:B&W 6.14 x 9.21in or 234 x 156mm (Royal 8vo) Case Laminate on White w/Gloss Lam.
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Da: Biblios, Frankfurt am main, HESSE, Germania
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Da: Ria Christie Collections, Uxbridge, Regno Unito
EUR 164,21
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Aggiungi al carrelloCondizione: New. In.
Lingua: Inglese
Editore: Springer Berlin Heidelberg, 2004
ISBN 10: 354022369X ISBN 13: 9783540223696
Da: moluna, Greven, Germania
EUR 136,16
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Aggiungi al carrelloGebunden. Condizione: New.
Hardcover. Condizione: New.
Lingua: Inglese
Editore: Springer Berlin Heidelberg, Springer Berlin Heidelberg, 2004
ISBN 10: 354022369X ISBN 13: 9783540223696
Da: AHA-BUCH GmbH, Einbeck, Germania
EUR 160,49
Quantità: 1 disponibili
Aggiungi al carrelloBuch. Condizione: Neu. Druck auf Anfrage Neuware - Printed after ordering - Chemical mechanical planarization, or chemical mechanical polishing as it is simultaneously referred to, has emerged as one of the critical processes in semiconductor manufacturing and in the production of other related products and devices, MEMS for example. Since its introduction some 15+ years ago CMP, as it is commonly called, has moved steadily into new and challenging areas of semiconductor fabrication. Demands on it for consistent, efficient and cost-effective processing have been steady. This has continued in the face of steadily decreasing feature sizes, impressive increases in wafer size and a continuing array of new materials used in devices today. There are a number of excellent existing references and monographs on CMP in circulation and we defer to them for detailed background information. They are cited in the text. Our focus here is on the important area of process mod els which have not kept pace with the tremendous expansion of applications of CMP. Preston's equation is a valuable start but represents none of the subtleties of the process. Specifically, we refer to the development of models with sufficient detail to allow the evaluation and tradeoff of process inputs and parameters to assess impact on quality or quantity of production. We call that an 'integrated model' and, more specifically, we include the important role of the mechanical elements of the process.
Da: UK BOOKS STORE, London, LONDO, Regno Unito
EUR 282,28
Quantità: 4 disponibili
Aggiungi al carrelloCondizione: New. Brand New! Fast Delivery This is an International Edition and ship within 24-48 hours. Deliver by FedEx and Dhl, & Aramex, UPS, & USPS and we do accept APO and PO BOX Addresses. Order can be delivered worldwide within 6-10 days and we do have flat rate for up to 2LB. Extra shipping charges will be requested if the Book weight is more than 5 LB. This Item May be shipped from India, United states & United Kingdom. Depending on your location and availability.
Da: Mispah books, Redhill, SURRE, Regno Unito
EUR 285,91
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Aggiungi al carrelloHardcover. Condizione: Like New. Like New. book.
Lingua: Inglese
Editore: Springer Berlin Heidelberg, Springer Berlin, 2004
ISBN 10: 354022369X ISBN 13: 9783540223696
Da: BUCHSERVICE / ANTIQUARIAT Lars Lutzer, Wahlstedt, Germania
EUR 299,90
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Aggiungi al carrelloHardcover. Condizione: gut. 2004. Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabri In deutscher Sprache. pages.
Condizione: New. (inventory#Shelf).
Lingua: Inglese
Editore: Springer Berlin Heidelberg Okt 2004, 2004
ISBN 10: 354022369X ISBN 13: 9783540223696
Da: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Germania
EUR 160,49
Quantità: 2 disponibili
Aggiungi al carrelloBuch. Condizione: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Chemical mechanical planarization, or chemical mechanical polishing as it is simultaneously referred to, has emerged as one of the critical processes in semiconductor manufacturing and in the production of other related products and devices, MEMS for example. Since its introduction some 15+ years ago CMP, as it is commonly called, has moved steadily into new and challenging areas of semiconductor fabrication. Demands on it for consistent, efficient and cost-effective processing have been steady. This has continued in the face of steadily decreasing feature sizes, impressive increases in wafer size and a continuing array of new materials used in devices today. There are a number of excellent existing references and monographs on CMP in circulation and we defer to them for detailed background information. They are cited in the text. Our focus here is on the important area of process mod els which have not kept pace with the tremendous expansion of applications of CMP. Preston's equation is a valuable start but represents none of the subtleties of the process. Specifically, we refer to the development of models with sufficient detail to allow the evaluation and tradeoff of process inputs and parameters to assess impact on quality or quantity of production. We call that an 'integrated model' and, more specifically, we include the important role of the mechanical elements of the process. 336 pp. Englisch.
Da: preigu, Osnabrück, Germania
EUR 141,20
Quantità: 5 disponibili
Aggiungi al carrelloBuch. Condizione: Neu. Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication | From Particle Scale to Feature, Die and Wafer Scales | David A. Dornfeld (u. a.) | Buch | xxiv | Englisch | 2004 | Springer-Verlag GmbH | EAN 9783540223696 | Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg, juergen[dot]hartmann[at]springer[dot]com | Anbieter: preigu Print on Demand.
Lingua: Inglese
Editore: Springer Berlin Heidelberg, Springer Berlin Heidelberg Okt 2004, 2004
ISBN 10: 354022369X ISBN 13: 9783540223696
Da: buchversandmimpf2000, Emtmannsberg, BAYE, Germania
EUR 160,49
Quantità: 1 disponibili
Aggiungi al carrelloBuch. Condizione: Neu. This item is printed on demand - Print on Demand Titel. Neuware -Chemical mechanical planarization, or chemical mechanical polishing as it is simultaneously referred to, has emerged as one of the critical processes in semiconductor manufacturing and in the production of other related products and devices, MEMS for example. Since its introduction some 15+ years ago CMP, as it is commonly called, has moved steadily into new and challenging areas of semiconductor fabrication. Demands on it for consistent, efficient and cost-effective processing have been steady. This has continued in the face of steadily decreasing feature sizes, impressive increases in wafer size and a continuing array of new materials used in devices today. There are a number of excellent existing references and monographs on CMP in circulation and we defer to them for detailed background information. They are cited in the text. Our focus here is on the important area of process mod els which have not kept pace with the tremendous expansion of applications of CMP. Preston's equation is a valuable start but represents none of the subtleties of the process. Specifically, we refer to the development of models with sufficient detail to allow the evaluation and tradeoff of process inputs and parameters to assess impact on quality or quantity of production. We call that an 'integrated model' and, more specifically, we include the important role of the mechanical elements of the process.Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg 336 pp. Englisch.