Focused Ion Beam Systems: Basics and Applications - Brossura

Brossura

ISBN 10: 0521158591 ISBN 13: 9780521158596

Casa editrice: Cambridge University Press, 2011

Riassunto

This edited volume, first published in 2007, comprehensively covers the focused ion beam and two beam technology.

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Descrizione del libro

This edited volume, first published in 2007, comprehensively covers the focused ion beam and two beam technology. Presenting the basic principles, capabilities, challenges, advantages, applications and when best to implement the technology, this is a valuable resource for researchers in materials science, electrical engineering and nanotechnology.

Contenuti

List of contributors; Preface; 1. Introduction to the focused ion beam system Nan Yao; 2. Interaction of ions with matter Nobutsugu Imanishi; 3. Gas assisted ion beam etching and deposition Hyoung Ho (Chris) Kang, Clive Chandler and Matthew Weschler; 4. Imagining using electrons and ion beams Kaoru Ohya and Tohru Ishitani; 5. Characterization methods using FIB/SEM DualBeam instrumentation Steve Rentjens and Lucille A. Giannuzzi; 6. High-density FIB-SEM 3D nanotomography: with applications of real-time imaging during FIB milling E. L. Principe; 7. Fabrication of nanoscale structures using ion beams Ampere A. Tseng; 8. Preparation for physico-chemical analysis Richard Langford; 9. In-situ sample manipulation and imaging T. Kamino, T. Yaguchi, T. Ohnishi and T. Ishitani; 10. Micro-machining and mask repair Mark Utlaut; 11. Three-dimensional visualization of nanostructured materials using focused ion beam tomography Derren Dunn, Alan J. Kubis and Robert Hull; 12. Ion beam implantation of surface layers Daniel Recht and Nan Yao; 13. Applications for biological materials Kirk Hou and Nan Yao; 14. Focused ion beam systems as a multifunctional tool for nanotechnology Toshiaki Fujii, Tatsuya Asahata and Takashi Kaito; Index.

Dettagli dell'edizione

• Editore: Cambridge University Press
• Data di pubblicazione: 2011
• Lingua: Inglese
• ISBN 10: 0521158591
• ISBN 13: 9780521158596
• Rilegatura: Copertina flessibile
• Numero di pagine: 408
• Redattore: Yao Nan
• Contatto del produttore: non disponibile
• Persona responsabile: Avery; https://www.avery.fr/; ; chemin des peupliers 27; Dardilly; Francia