Handbook of Microlithography, Micromachining and Microfabrication: v.1 - Rilegato

 
9780852969069: Handbook of Microlithography, Micromachining and Microfabrication: v.1
Rilegato
ISBN 10: 0852969066 ISBN 13: 9780852969069
Casa editrice: Inst of Engineering & Technology, 1997

Sinossi

Lithography is the key technology that has enabled the dynamic growth of the integrated circuit industry over the past two decades. With the continuing demand for technological development, lithography remains at the frontier of high technology. This authoritative handbook provides a comprehensive resource for process development and training, in both the microelectronics device manufacturing field and newer application areas, such as sensors, actuators and biomedical devices. The handbook is written by leading experts in the field, and may be used as a reference or text by researchers and engineers who are not expert in the area as well as a good reference for those who are.

Le informazioni nella sezione "Riassunto" possono far riferimento a edizioni diverse di questo titolo.

Editore
Inst of Engineering & Technology
Data di pubblicazione
1997
Lingua
Inglese
ISBN 10 
0852969066
ISBN 13 
9780852969069
Rilegatura
Copertina rigida
Numero di pagine
776
Redattore
Rai-Choudhury P.
Contatto del produttore
non disponibile
Persona responsabile
non disponibile

Altre edizioni note dello stesso titolo

9780819497864: Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1: Microlithography

Edizione in evidenza

ISBN 10:  081949786X ISBN 13:  9780819497864
Casa editrice: SPIE Press, 1997
Brossura