Chemical-Mechanical Planarization Volume 867: Integration, Technology and Reliability

Johns, E. C. & A. Kumar & J. A. Lee & Y. S. Obeng & I. Vos

ISBN 10: 1558998209 / ISBN 13: 9781558998209

Editore: Materials Research Society, 2005

MRS Proceedings; 0 X 0 X 0 inches; In shrink wrap! No visible defects. Appears never read. ; - Your satisfaction is our priority. We offer free returns and respond promptly to all inquiries. Your item will be carefully cushioned in bubble wrap and securely boxed. All orders ship on the same or next business day. Buy with confidence. Codice articolo TOB224-60469-A-4.61

Riassunto:

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Descrizione del libro: This 2005 book brings together experts from a broad spectrum of research and technology groups currently working on CMP, to review advances made, and to offer a comprehensive discussion of challenges that must be overcome. Topics include: planarization processes and applications; CMP equipment and metrology; and CMP modeling and simulation.

Dati bibliografici

Titolo: Chemical-Mechanical Planarization Volume 867...
Casa editrice: Materials Research Society
Data di pubblicazione: 2005
Legatura: Hardcover
Condizione: Near Fine
Condizione sovraccoperta: No Dust Jacket